Title: Reliable and high Productive (>80% yield) Hydrogen sensor Module based on 3D Nano-Structure Technology for High concentrated

Summary: This new project aims to develop a hydrogen gas sensor with a micro-heater at a hydrogen-based society that is fabricated using MEMS technology. Various applications that can be found on the market such as the electric vehicle and the transformer will be analyzed.

Hydrogen plays a significant role in chemical production, fuel cell technology, fuel for cars, rocket engines, nuclear reactors etc. However, hydrogen is colorless, odorless, tasteless, flammable and explosive at concentration above 4%. The introduction of hydrogen as a consumer fuel has caused heightened concern over its safety with a corresponding increased interest in hydrogen sensors and leak detection.
Hydrogen is the lightest flammable gas on the earth, featuring a wide flammable range and small ignition energy. Hydrogen should be kept under adequate control environments. Therefore safety measures are taken to prevent hydrogen from leaking, detect and leak immediately and suspend hydrogen supply, and prevent leaked hydrogen from accumulating.
Stability and reliability of a grid power system in many respects depend on the condition of power transformers, whose failures and damage may cause the outage of a power system so that its health condition must be continuously monitored and evaluated for appropriate asset management decisions.
In order to avoid any possible outage and to choose the appropriate maintenance using the dissolved gas analysis (DGA), power transformer health assessment has conduct to the online condition monitoring systems instead of traditional technique called Gas-chromatographs technology for fault diagnosis in taking sample from transformers directly.

The project will develop a low-cost, low-power, durable, and reliable hydrogen safety sensor integrated temperature in the range of low and high concentrated environment with MEMS technology for stationary and infrastructure applications, extendable to vehicle protection, through 3-dimensinal nano-structure material, sensor design.
The thermal resistive type hydrogen safety sensor will be developed based on MEMS technology with three-dimensional nano-structure technology using 8inch silicon substrate. MNTek will provide high performance sensor design with micro-heater, temperature sensor and sensing materials using the design parameters properly to meet the requirement. Sogang University will provide there-dimensional nano-structure technology to integrate high performance hydrogen gas sensor fabricated by angle deposition technique for palladium-Nickel sensing material. NNFC will provide the process integration of the low cost, reliable hydrogen sensor based on MEMS technology carried out the process simulation with multiple layers such as the micro-heater, temperature sensor and sensing layer. This approach is to reduce the cost and to increase the performance, reliability and productivity.

Phase 1 – Requirements Analysis – 01/01/2021 – 31/12/2021

A1.1 Performance requirements analysis (correlated with T1.1)

Within this activity, the micro-electro-mechanical systems (MEMS) and their related technologies were defined. Some of the most well-known materials used to fabricate them and the manufacturing technologies have been described.

A1.2 Hardware and software requirements analysis (correlated with T1.2)

In this activity, the specific parameters of hydrogen sensors were presented, and a classification of hydrogen sensors was made according to their field of use. The hardware and software characteristics for each field of use were presented. Furthermore, the evolution of emerging gas sensor technologies over time, and the shortcomings and differences in the operation processes of hydrogen sensors in signal generation were presented.

A1.3 Risk analysis (correlated with T1.3)

This activity analyzed the existing regulations, codes, and standards applicable to the safety and protection of humans against hydrogen potential risks. The risk conditions of hydrogen sensors were presented in applications targeting various fields and a risk analysis of hydrogen from the point of view of ignition was presented.

A1.4 Conceptual design (correlated with T1.4)

During this activity, the required technical conditions for the development of the operational model of the hydrogen sensor were presented. The new conditions identified in order to reach the project goal were presented. Also, the conceptual model of the hydrogen sensor related to the “Hydrogen sensor module based on 3D nano-structure technology, reliable and high productivity (> 80% efficiency) for high concentrations” project was illustrated.


Detection mechanism with MOS condenser for hydrogen sensor

3D nanostructured PEM amperometric sensor – conceptual model

Dissemination of the results:

Within Stage I – Requirements Analysis, the following activities were organized and performed:

  • POSTER  PAPER UNDER EVALUATION – George Suciu, Andrei Scheianu, Ioana Petre, Hydrogen sensor module based on MEMS technology, WorldCist’22 – 10th World Conference on Information Systems and Technologies, to be held in Budva, Montenegro, 12 – 14 April 2022.
  • Participation at Space Innovation Forum 2021BEIA Consult participated in Space Innovation Forum 2021 on 17th-18th March 2021. BEIA participated at this event and presented Hydro3D project. Space Innovation Forum welcomes stakeholders from all levels and sectors; from students to senior space experts, scientists, investors, and community builders.
  • Participation la Earth Observation Info Days 2021 (9-12 March 2021)

BEIA Consult participates in Earth Observation Info Days 2021 on 9-12 March 2021.

The European Space Agency, ESA, is organising the EO Info Days to introduce activities in FutureEO Block 4 “EO Science for Society”, Global Development Assistance (GDA), and Investing in Industrial Innovation (InCubed) programmes. The main goals of these Info Days will be to present the opportunities for European entities to participate in the activities of these programmes.

  • Participation at BLOCKS webinar (25th March 2021)

BEIA participated in the BLOCKS webinar on 25th March 2021. Several projects of interest were mentioned, including the Hydro3D project.

  • Participation at Ovidius University: Job fair – FMI

BEIA presented a few projects in Ovidius University: Job fair – FMI – 2021 on 20 May 2021.

  • Participation at GoTech World 2021

Our company participated on 10-11 November in GoTech World 2021. It was a great opportunity to disseminate a lot of projects.

Phase 2 – Design, Development and Experimentation of the intelligent network

Activity 2.1 Design and development of the hardware and software components of the intelligent network

In this activity, a presentation of hydrogen, detection technologies, market requirements and the aspects that will be considered in order to design a hydrogen sensor was made. The solutions developed by project partners were presented.

Activity 2.2 Intelligent network experimentations

In this activity, the results of the simulations and performed experiments that were used for the experimental analysis of the hydrogen sensors were presented.

Activity 2.3 Intelligent network optimization and operating parameters establishment

In this activity, the experiments undertaken for the optimization of the intelligent network regarding the hydrogen sensor and the establishment of the optimal operating parameters were presented. Tests were also carried out with other active materials, and the solution that offers the best result was presented.

Dissemination of the results:


BEIA presented on 16th of November the “Hydrogen sensor module based on MEMS technology” paper in TELFOR 2022 Conference. Telecommunications Forum TELFOR is organized as an INTERNATIONAL annual meeting of those professionals working in the broad fields of Telecommunications and Information Technologies. The participants are mostly telecommunications engineers, but also the economists, jurists, managers, governmental officials, students, researchers, operators, service providers and others.

Website: https://www.telfor.rs/en/

SCEWC 2022

Our company participated in SCEWC (Smart City Expo World Congress) 2022 on 15-17 November 2022 in Barcelona, Spain. Held in Barcelona since 2011, Smart City Expo World Congress is the international leading event for cities. Our mission is to empower cities and collectivize urban innovation across the globe.

Website: https://www.smartcityexpo.com/

GoTech World 2022

BEIA participated as exhibitor in GoTech World 2022 on 3-4 November 2022 in Bucharest, Romania. It was a great opportunity to disseminate the Hydro3D project with participants.

Website: https://www.gotech.world/

Romania Info Day – Innoveit Weeks 2022 – HYBRID event

BEIA participated in romania Info Day – Innoveit Weeks 2022 on 21st of October 2022. The CEO had an interview on Cyber Security – hybrid roundtable talk – moderated by: Prof. Anca Andreica, dean of Faculty of Mathematics and Computer Science, Babeș-Bolyai University.

That was a great opportunity to disseminate the HYDRO3D project.

Website: https://www.eventbrite.com/e/romania-info-day-innoveit-weeks-2022-hybrid-event-tickets-422427099827?utm_campaign=Oktopost-Innoveit2022&utm_content=Oktopost-Twitter&utm_medium=social&utm_source=Twitter


BEIA participated in Hydrogen Week 2022 on 24-28 October 2022. Was a great opportunity to disseminate HYDRO3D project in the networking sessions.

The European Hydrogen Week is the biggest annual event dedicated to hydrogen under the lead of the Clean Hydrogen Partnership and its members, the European Commission, Hydrogen Europe, and Hydrogen Europe Research.

Website: https://www.clean-hydrogen.europa.eu/media/news/get-ready-european-hydrogen-week-2022-2022-06-02_en

SID 2022 – Sibiu Innovation Days

BEIA participated online in Sibiu Innovation Days on 29th-30th of September 2022.

In the networking sessions BEIA had the opportunity to disseminate the Hydro3D project.

Website: https://events.ulbsibiu.ro/innovationdays/

Phase 3 – Implementation of the energy management mode. Testing, validation and performance evaluation

Activity 3.1 – Implementation of the energy management mode (correlated with T6.5)

This activity presented the current status of energy optimization for existing hydrogen sensors based on studies carried out by scientific researchers and presented the developed energy management solution for the hydrogen sensor developed in the project.

Activity 3.2 – Testing and validating the smart network

In this activity, the conditions and test method for the hydrogen sensor were presented, as well as the preliminary results obtained. Four coin-type hydrogen sensors were developed based on the PEMFC hydrogen oxidation reaction mechanism under normal conditions (room temperature and atmospheric pressure), using 4 types of catalyst in the anode compartment, based on Pt nanoparticles between 20-40% Pt and 20% Ru on 2 types of high surface area carbon such as Vulcan XC72 and HiSpec carbon black.

Dissemination activities

This activity presents the activities that were carried out in order to disseminate project results.

Furthermore, in 2023 two workshops were held between project partners.

  • The third project workshop took place on 9-11 May 2023 and was held in Korea (Micro & Nano technology, National Nanofab Center, Sogan University, and Lotte Hotel Seoul)
  • The fourth workshop of the project was organised on 21-22 September 2023 and took place in Romania (ICPE-CA, Beia Consult International and MGM Star Construct)

Phase 4 – Definition of the business model, testing and characterisation of the experimental model, dissemination of results and protection of intellectual property.

Activity 4.1 – Business model definition; Testing and characterization of the experimental model

In this activity an analysis of the hydrogen sensor market at national and international level was carried out, presenting the market size, hydrogen sensor applications, regulations, technological environment, innovations, market opportunities and challenges.

Furthermore, in the second part of this activity the business plan (financial forecast) for the products and services resulting from the Hydro 3D project was presented.

Activity 4.2 – Dissemination of results through scientific articles

In this phase dissemination and communication events in which BEIA participated in order to disseminate the Hydro3D project were presented.

Activity 4.3 – Protecting intellectual property by developing and filing a patent application

In this activity, the activities of intellectual property protection were presented, i.e. the activities of drafting and filing the patent application of the Hydro3D project were described.

Dissemination activities

This activity presents the activities that were carried out in order to disseminate project results.

  • Participation in Hydrogen Valley workshop “Opportunities for cooperation” (25 October 2023)
  • Participation in Hydrogen Valley workshop: “Success factors for H2 Valley development” (31 October 2023)
  • Participation in GoTech World 2023 (8-9 November 2023)  https://beiaro.eu/participation-in-gotech-world-2023/



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